测试技术学报2024,Vol.38Issue(2):120-128,9.DOI:10.3969/j.issn.1671-7449.2024.02.004
基于冲击法的压电式力传感器灵敏度研究
Study on Sensitivity of Piezoelectric Force Sensors Based on Impact Method
摘要
Abstract
In order to calibrate the dynamic sensitivity of piezoelectric force sensors under the impact force calibration device,the drop hammer impact force model based on free-falling bodies and the horizontal mass block impact collision model based on air-bearing suspension support was first introduced.Then,through 4th order Butterworth low-pass filtering,the filtering smoothness of acceleration signal waveform was studied,and the filtering effects of different cut-off frequencies were compared.Finally,a comparative experiment was conducted on the measurement of acceleration using a laser vibrometer and a standard accelerometer to investigate the impact of the absolute acceleration measurement method and comparative measurement method on the accuracy of dynamic sensitivity calibration of force sensors.The experimental results indicate that the acceleration measurement of the laser vibration meter must be achieved through differential demodulation,and a 4-order Butterworth low-pass filter with an appropriate upper cut-off frequency should be selected for filtering and smoothing processing;The dynamic force accuracy reproduced by the absolute laser interference method is 2%,and the dynamic force accuracy reproduced by the accelerometer comparison method is 4%;The sensitivity fluctuation of laser interference absolute method calibration is smaller than that of accelerometer comparison method calibration.关键词
灵敏度/力传感器/校准/动态特性/巴特沃斯滤波器Key words
sensitivity/force sensor/calibration/dynamic characteristic/Butterworth filter引用本文复制引用
王振,范海艇,施娟,王军,李政..基于冲击法的压电式力传感器灵敏度研究[J].测试技术学报,2024,38(2):120-128,9.基金项目
上海市质量监督检验技术研究院青年科技启明星资助项目(QMX-2022-10-JL) (QMX-2022-10-JL)