舰船电子工程2024，Vol.44Issue(1)：224-229,6.DOI:10.3969/j.issn.1672-9730.2024.01.044
一种L～U波段RF MEMS单刀十掷开关的设计
Design of an L～U Band RF MEMS Single-blade 10-throw Switch
湛永鑫 1吴倩楠 2陈玉 1郭宏磊 1李孟委1
作者信息
- 1. 中北大学仪器与电子学院 太原 030051||中北大学前沿交叉科学研究院 太原 030051
- 2. 中北大学前沿交叉科学研究院 太原 030051||中北大学半导体与物理学院 太原 030051
- 折叠
摘要
Abstract
An RF MEMS single-blade 10-throw switch for the 1～60 GHz frequency band is proposed is this paper.The switch adopts a triangular upper electrode structure to reduce the cantilever beam equivalent elastic coefficient and closed contact area to achieve low drive voltage and high isolation.The signal loss problem is improved by step compensation by asymptotic transmission line structure is improved.The simulation results show that the drive voltage of this single-blade 10-throw switch is 13V.In the fre-quency range of 1GHz～60GHz,the insertion loss of the output ports on both sides of the input is<2dB,insertion loss of the remain-ing eight ports £ 0.59dB,and the isolation of all ports is>30dB.This switch can be used in wireless communication systems,radar systems and instrumentation measurement systems where high RF performance is required.关键词
宽频带/单刀十掷开关/RF MEMS开关/三角形上电极/渐进传输线Key words
wide band/single throw switch/RF MEMS switch/triangular upper electrode/progressive transmission line分类
信息技术与安全科学引用本文复制引用
湛永鑫,吴倩楠,陈玉,郭宏磊,李孟委..一种L～U波段RF MEMS单刀十掷开关的设计[J].舰船电子工程,2024,44(1):224-229,6.
