计量学报2024，Vol.45Issue(3)：305-310,6.DOI:10.3969/j.issn.1000-1158.2024.03.01
2～10 μm台阶高度标准物质候选物的研制和质量评价
Fabrication and Quality Evaluation of 2～10 μm Step Height Reference Material Candidates
摘要
Abstract
The micrometer step height reference materials can used to calibrate the z-axis performance of the instrument and transmit accurate micrometer height values.The step height reference material candidates with 2,5,10 μm nominal size are prepared by photolithography combined with dry etching.The height,roughness,and parallelism of the steps are characterized.Using a laser confocal microscope and an aspheric measuring instrument for measurement,the step height is evaluated based on the bilateral algorithm,histogram method,ISO algorithm,and the decoupling criterion for optical microscopy method.For the same reference material candidates,the standard deviation between each evaluation method does not exceed 0.024 μm.Moreover,the relative deviation of the step height evaluation values is within 5％.This indicates that the evaluation results obtained using different algorithms and instruments have a high level of consistency and reliable measurement values.The comparison of evaluation results from different instruments indicates that the evaluation methods also have good consistency.Meanwhile,the roughness does not exceed 0.04 μm.The parallelism of the upper and lower surfaces does not exceed 0.03°,which verifies the good preparation effect of the reference material candidates.关键词
微米计量/台阶高度标准物质/干法刻蚀/粗糙度/平行度Key words
micron metrology/step height reference material/dry etching/roughness/parallelism分类
通用工业技术引用本文复制引用
柳迪,王琛英,张雅馨,王云祥,王松,陈伦涛,王永录,朱楠,蒋庄德..2～10 μm台阶高度标准物质候选物的研制和质量评价[J].计量学报,2024,45(3):305-310,6.基金项目
国家自然科学基金(52175354) （52175354）
