计量学报2024，Vol.45Issue(3)：318-324,7.DOI:10.3969/j.issn.1000-1158.2024.03.03
一种新的大行程垂直纳米运动工作台设计与控制研究
Design and Control of a New Long-Stroke Vertical Nano-Motion Stage
摘要
Abstract
The design and stable control of the stage are key factors in large stroke high-precision vertical motion.Therefore,a novel motion stage with a balancing mechanism is proposed to achieve large stroke nano stable motion in the vertical direction.The characteristics of the stage are that the N331 piezoelectric linear motor is independently driven,suspended through the air static guide rail,and the Z-axis balance system is designed to reduce the motor driving load.A stepping mode is used to realize the large travel actuation,and an analog mode is adopted to implement micro-displacement actuation.This strategy can be used to achieve fast and precise driving of 100 mm.In addition,the Z-stage can achieve compound control of the nanostepping and analog modes.The positioning fluctuation can be limited to±9 nm within the full range of 100 mm.According to the verification experiments,the stage can be suitable for driving and control tasks in coordinate measuring machines(CMMs),microlithography,and micromachining applications.关键词
几何量计量/纳米运动工作台/垂直运动/大行程/纳米步进/模拟模式Key words
geometric metrology/nano-motion stage/vertical motion/large stroke/nanostepping/analog mode分类
通用工业技术引用本文复制引用
张帆,黄强先,程荣俊,张连生,李红莉,李瑞君..一种新的大行程垂直纳米运动工作台设计与控制研究[J].计量学报,2024,45(3):318-324,7.基金项目
国家重点研发计划(2019YFB2004901) （2019YFB2004901）
国家自然科学基金(51875163) （51875163）
