触针式表面形貌测量仪探针几何特性引起的失真机理与识别方法OACSTPCD

Contact surface topography measuring instruments are commonly utilized for assessing variables such as surface roughness,geometric shapes,and waviness.Nevertheless,the convolution effect produced by the probe's interaction with the test surface can result in measurement distortion.An analysis is performed on the distortion mechanism influenced by the geometric characteristics of the probe,classifying distortions based on their properties into conventional and complex distortions.In response to the distortion phenomena caused by the compound effects of a spherical probe tip and cone angles,a multimodal recognition method for complex distortion is proposed.Experimental outcomes indicate that compared to the limitations of single-mode recognition of conventional distortions by the topography measuring instrument,the proposed method could effectively identify complex distortions present in topography measurement results.Moreover,it offers a credible interpretation of the measurement results,providing a novel strategy for the accurate identification and correction of distorted data within these results.