计量学报2024，Vol.45Issue(3)：325-331,7.DOI:10.3969/j.issn.1000-1158.2024.03.04
触针式表面形貌测量仪探针几何特性引起的失真机理与识别方法
Mechanism and Identification Method of Distortion Caused by the Geometry Characteristic of Probe in Contact Surface Topography Measuring Instrument
摘要
Abstract
Contact surface topography measuring instruments are commonly utilized for assessing variables such as surface roughness,geometric shapes,and waviness.Nevertheless,the convolution effect produced by the probe's interaction with the test surface can result in measurement distortion.An analysis is performed on the distortion mechanism influenced by the geometric characteristics of the probe,classifying distortions based on their properties into conventional and complex distortions.In response to the distortion phenomena caused by the compound effects of a spherical probe tip and cone angles,a multimodal recognition method for complex distortion is proposed.Experimental outcomes indicate that compared to the limitations of single-mode recognition of conventional distortions by the topography measuring instrument,the proposed method could effectively identify complex distortions present in topography measurement results.Moreover,it offers a credible interpretation of the measurement results,providing a novel strategy for the accurate identification and correction of distorted data within these results.关键词
几何量计量/探针/几何特性/失真/表面形貌/多模态识别Key words
geometric metrology/probe/geometry characteristic/distortion/surface topography/multimodal recognition分类
通用工业技术引用本文复制引用
王康,皮磊,张树,张诗涵,施玉书..触针式表面形貌测量仪探针几何特性引起的失真机理与识别方法[J].计量学报,2024,45(3):325-331,7.基金项目
国家重点研发计划(2021YFF0700403) （2021YFF0700403）
