计量学报2024，Vol.45Issue(3)：349-355,7.DOI:10.3969/j.issn.1000-1158.2024.03.07
基于激光干涉仪同步测量的动态校准装置
Dynamic Calibration Device Based on Synchronous Measurement of Laser Interferometer
摘要
Abstract
To realize the instantaneous dynamic test of time-varying geometry,a dynamic calibration device based on synchronous measurement of laser interferometer was developed.The device used linear motion rail as motion generator,laser interferometer as length standard,synchronous trigger based on GNSS tame clock to measure synchronously and ensure accurate and stable time,and dynamic calibration software to achieve control integration.By comprehensively analyzing the factors such as length measurement and time delay,the measurement uncertainty of the length indication of the device was Q[1.8 μm,3 × 10-7L](k=2).Two experiments proved the rationality of uncertainty evaluation and the feasibility of the device in the instantaneous dynamic accuracy test of laser tracker.关键词
几何量计量/动态校准/激光干涉仪/同步测量/大尺寸测量/时变几何量Key words
geometric metrology/dynamic calibration/laser interferometer/synchronous measurement/large scale measurement/time-varying geometry分类
通用工业技术引用本文复制引用
任瑜,胡晓磊,郭志敏,傅云霞,张丰..基于激光干涉仪同步测量的动态校准装置[J].计量学报,2024,45(3):349-355,7.基金项目
上海市市场监督管理局科研项目(2021-04) （2021-04）
