计量学报2024，Vol.45Issue(3)：356-363,8.DOI:10.3969/j.issn.1000-1158.2024.03.08
AFM-TM微悬臂梁系统混沌运动及控制算法分析
Chaotic Motion and Control Algorithm Analysis of AFM-TM Microcantilever System
摘要
Abstract
To address the issue of measurement accuracy in atomic force microscope in tapping mode(AFM-TM)caused by the chaotic motion of the AFM-TM cantilever beam system,this study focused on analyzing the dynamic characteristics and control algorithm of the system.Through numerical simulation,the Lyapunov index,bifurcation diagram,Poincaré cross section,and phase diagram were used to analyze the evolution of the motion characteristics of AFM-TM microcantilever beam system when the external excitation amplitude changes.The delayed feedback control and fuzzy adaptive delayed feedback were proposed to control the chaotic motion of the system.Finally,the two control algorithms were compared.The results showed that the system exhibited obvious chaotic motion characteristics when the dimensionless external excitation amplitude was within the range of values such as[0.65,0.85].Both the time-delay feedback control and the fuzzy adaptive time-delay feedback control could effectively pull the chaotic motion of the system back to the periodic orbit,but the fuzzy adaptive time-delay feedback was more suitable for the complex situation of the change of the AFM-TM sample.The research results provide a significant theoretical reference for selecting external excitation parameters of AFM-TM microcantilever beams,analyzing complex dynamic characteristics of nonlinear systems and controlling chaotic motion.关键词
几何量计量/轻敲式原子力显微镜/微悬臂梁/混沌运动/延时反馈控制/模糊控制Key words
geometric metrology/AFM-TM/microcantilever/chaotic motion/time-delayed feedback control/fuzzy control分类
通用工业技术引用本文复制引用
宋佩颉,褚衍东,张航,俞睿..AFM-TM微悬臂梁系统混沌运动及控制算法分析[J].计量学报,2024,45(3):356-363,8.基金项目
西藏自治区科技计划(XZ202301YD0004C) （XZ202301YD0004C）
甘肃省青年科技基金(21JR7RA316) （21JR7RA316）
中国计量科学研究院科研项目(AKYZD2307) （AKYZD2307）
甘肃省计量研究院科研项目(GJY2023003) （GJY2023003）
