计量学报2024，Vol.45Issue(3)：412-418,7.DOI:10.3969/j.issn.1000-1158.2024.03.15
光谱共焦传感器多参数高准确度校准
Spectral Confocal Sensor Multi-Parameter High-Accuracy Calibration
摘要
Abstract
Aiming at the problem of lack of calibration device and method for high accuracy spectral confocal sensor,a calibration method based on laser interferometry is proposed and the corresponding calibration device is developed.On the one hand,a wavelength multiples interval measurement method is proposed,by displacement feedback control,the displacement interval is set as an integer multiple of the laser wavelength,so as to reduce the influence of nonlinear error of laser interferometer on measurement.On the other hand,the measuring point correction algorithm is proposed to eliminate the influence of the displacement standard value on the measurement due to the limitation of the positioning accuracy of the calibration device.Experimental results demonstrate that within the measurement range of 0～100 μm,the indication error is±23 nm,repeatability is 5 nm,and the expanded uncertainty of the indication error measurement results is U2=7.0 nm(k=2).The uncertainty of indication error measurement results for the constructed calibration device within the measurement range of 0～50 mm is U1=3.0 nm+2 × 10-7 L(k=2).关键词
几何量计量/光谱共焦传感器/干涉仪非线性/测点修正算法/测量不确定度Key words
geometric metrology/spectral confocal sensor/interferometer nonlinearity/measuring point correction algorithm/measurement uncertainty分类
通用工业技术引用本文复制引用
杨品澒,唐波,崔建军,陈恺,宋佩颉,彭璐..光谱共焦传感器多参数高准确度校准[J].计量学报,2024,45(3):412-418,7.基金项目
西藏自治区科技计划项目(XZ202301YD0004C) （XZ202301YD0004C）
中国计量科学研究院科研项目(AKYZD2307,AKYZZ2204) （AKYZD2307,AKYZZ2204）
