计量学报2024，Vol.45Issue(3)：419-424,6.DOI:10.3969/j.issn.1000-1158.2024.03.16
基于曲面拟合的光学偏折系统显示屏标定方法
Calibration Method for Optical Deflection System Display Screen Based on Surface Fitting
摘要
Abstract
A surface fitting method is proposed to fit the surface shape distribution of the display screen,which is the most critical calibration step in the transmission optical deflection system.A wavefront detection simulation model based on transmission optical deflection technique is established,and the impact of two different display screen surface fitting methods on wavefront measurement is analyzed.The simulation results show that the root mean square error(RMS)of the wavefront aberration of the planar screen model is 0.837 5 μm.The RMS value of the simulated wavefront aberration of the curved screen model is only 0.059 6 μm.Using a transmissive optical deflection system for wavefront measurement of spherical lenses,the RMS value of wavefront aberration in the curved screen model is 0.137 1 μm.The RMS value of wavefront aberration in the flat screen model is 1.432 6 μm.The experimental results show that the use of surface fitting is significantly better than plane fitting,confirming the feasibility of surface fitting screen models.关键词
光学计量/透射式光学偏折术/显示屏标定/波前测量/曲面拟合Key words
optical metrology/transmission optical deflection technique/screen calibration/wavefront measurement/surface fitting分类
通用工业技术引用本文复制引用
郭创为,管钰晴,沈瑶琼,徐瑞书,朱言瑧,刘丽琴,张玉杰,雷李华,傅云霞..基于曲面拟合的光学偏折系统显示屏标定方法[J].计量学报,2024,45(3):419-424,6.基金项目
上海市自然科学基金(21ZR1483100) （21ZR1483100）
