红外技术2024，Vol.46Issue(3)：261-268,8.
氧化钒非制冷探测器吸收特性研究
Study on Absorption Characteristics of VOx Uncooled Detectors
杨君 1杨春丽 1袁俊 1尹树东 1李华英 1白兰艳 1马敏1
作者信息
- 1. 昆明物理研究所,云南 昆明 650223
- 折叠
摘要
Abstract
As the pixel size of the vanadium oxide(VOx)uncooled infrared focal plane decreased,the absorption area of the detector exhibited a sharp quadratic decrease in the edge length.Improving the absorption efficiency of the VOx uncooled infrared focal plane arrays has become a crucial research topic.In this study,a comprehensive and systematic simulation of the factors affecting the optical absorption of single-layer and double-layer VOx uncooled detectors was conducted from the aspects of material and structure,in terms of the absorption characteristics of single-layer material,different absorption structures,height of the cavity,and thickness of the film system.A systematic approach to improve the absorption of VOx uncooled detectors is provided by quantitatively comparing the factors with the simulation results,which have certain reference significance for the design and research of VOx uncooled detectors.关键词
氧化钒非制冷探测器/吸收特性/光学仿真/膜厚分析/腔体优化Key words
VOx uncooled detectors/absorption characteristics/optical simulation/film thickness analysis/cavity optimization分类
电子信息工程引用本文复制引用
杨君,杨春丽,袁俊,尹树东,李华英,白兰艳,马敏..氧化钒非制冷探测器吸收特性研究[J].红外技术,2024,46(3):261-268,8.
