基于电光聚合物薄膜的芯片式光学硅基电场传感器传感及温度特性研究OA北大核心CSTPCD

Under the background of'dual Carbon',the digital transformation of the new power system places higher demands on power sensor technology.In view of weak temperature stability of optical electric field sensor,a chip type optical silicon based electric field sensor based on electro-optical polymer film is proposed in this paper.Firstly,the principle of electro-optical effect,the second-order nonlinear optical effect of electro-optical polymer and the elec-tro-optical energy coupling method are introduced;Then,the processing flow of the sensor is designed and the prepa-ration is finished and,at the same time,the electro-optical polymer is successfully coated on the sensitive chip;Fi-nally,the linearity,AC response and temperature characteristic of the sensor are carried out by setting up the experi-mental test platform.The experimental results show that the prepared optical electric field sensor has good linearity and high sensitivity up to 0.945 mV·(kV·m-1)-1 under the power frequency electric field,and both output amplitude and phase of the sensor are stable in the temperature range of 0-75℃,with the maximum fluctuation of the amplitude ratio of 0.481 dB and the maximum phase difference of 3.82°.The structure of the sensor proposed in this paper prac-tically and feasibly improves the temperature characteristics of the silicon-based integrated optical electric field sen-sor,and provides a reference for the use of silicon-based integrated optical electric field sensors in power systems.