Microstructured Cantilever Probe on Optical Fiber Tip for Microforce SensorOA北大核心EI
Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor
Famei WANG;Changrui LIAO;Mengqiang ZOU;Dejun LIU;Haoqiang HUANG;Chao LIU;Yiping WANG
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,ChinaSchool of Electronics Science,Northeast Petroleum University,Daqing 163318,ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,China
Optical fiber sensormicroforce sensingmicrostructured cantilevertwo-photon polymerization
Optical fiber sensormicroforce sensingmicrostructured cantilevertwo-photon polymerization
《光子传感器（英文版）》 2024 (2)
89-99,11
This work was supported by the Shenzhen Science and Technology Program(Grant No.RCYX20200714114524139),Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing(Grant No.ZDSYS20220606100405013),Natural Science Foundation of Guangdong Province(Grant Nos.2022B1515120061 and 2022A1515110971),National Natural Science Foundation of China(Grant Nos.62122057,62075136,62105217,and 62305223),and China Postdoctoral Science Foundation(Grant No.2022M722173).
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