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Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor

Famei WANG Changrui LIAO Mengqiang ZOU Dejun LIU Haoqiang HUANG Chao LIU Yiping WANG

光子传感器（英文版）2024，Vol.14Issue(2)：89-99,11.

光子传感器（英文版）2024，Vol.14Issue(2)：89-99,11.DOI:10.1007/s13320-024-0704-6

Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor

Famei WANG ¹Changrui LIAO ¹Mengqiang ZOU ¹Dejun LIU ¹Haoqiang HUANG ¹Chao LIU ²Yiping WANG¹

作者信息

1. Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,China
2. School of Electronics Science,Northeast Petroleum University,Daqing 163318,China
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摘要

关键词

Optical fiber sensor/microforce sensing/microstructured cantilever/two-photon polymerization

Key words

Optical fiber sensor/microforce sensing/microstructured cantilever/two-photon polymerization

引用本文复制引用

Famei WANG,Changrui LIAO,Mengqiang ZOU,Dejun LIU,Haoqiang HUANG,Chao LIU,Yiping WANG..Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor[J].光子传感器（英文版）,2024,14(2):89-99,11.

基金项目

This work was supported by the Shenzhen Science and Technology Program(Grant No.RCYX20200714114524139),Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing(Grant No.ZDSYS20220606100405013),Natural Science Foundation of Guangdong Province(Grant Nos.2022B1515120061 and 2022A1515110971),National Natural Science Foundation of China(Grant Nos.62122057,62075136,62105217,and 62305223),and China Postdoctoral Science Foundation(Grant No.2022M722173). （Grant No.RCYX20200714114524139）

光子传感器（英文版）

OAEI

ISSN：1674-9251

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