Microstructured Cantilever Probe on Optical Fiber Tip for Microforce SensorOA北大核心EI
Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor
Benefiting from the great advances of the femtosecond laser two-photon polymerization(TPP)technology,customized microcantilever probes can be accurately 3-dimensional(3D)manufactured at the nanoscale size and thus have exhibited considerable potentials in the fields of microforce,micro-vibration,and microforce sensors.In this work,a controllable microstructured cantilever probe on an optical fiber tip for microforce detection is demonstrated both theoretically and experimentally.The static performances of the probe are firstly investigated based on the finite element method(FEM),which provides the basis for the structural design.The proposed cantilever probe is then 3D printed by means of the TPP technology.The experimental results show that the elastic constant k of the proposed cantilever probe can be actively tuned from 2.46N/m to 62.35N/m.The force sensitivity is 2.5nm/μN,the Q-factor is 368.93,and the detection limit is 57.43 nN.Moreover,the mechanical properties of the cantilever probe can be flexibly adjusted by the geometric configuration of the cantilever.Thus,it has an enormous potential for matching the mechanical properties of biological samples in the direct contact mode.
Famei WANG;Changrui LIAO;Mengqiang ZOU;Dejun LIU;Haoqiang HUANG;Chao LIU;Yiping WANG
Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing,Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,China||Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen 518060,ChinaSchool of Electronics Science,Northeast Petroleum University,Daqing 163318,China
Optical fiber sensormicroforce sensingmicrostructured cantilevertwo-photon polymerization
《光子传感器（英文版）》 2024 (002)
89-99 / 11
This work was supported by the Shenzhen Science and Technology Program(Grant No.RCYX20200714114524139),Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing(Grant No.ZDSYS20220606100405013),Natural Science Foundation of Guangdong Province(Grant Nos.2022B1515120061 and 2022A1515110971),National Natural Science Foundation of China(Grant Nos.62122057,62075136,62105217,and 62305223),and China Postdoctoral Science Foundation(Grant No.2022M722173).
评论