湖南大学学报（自然科学版）2024，Vol.51Issue(4)：123-131,9.DOI:10.16339/j.cnki.hdxbzkb.2024178
基于金属电化学腐蚀的单晶SiC表面腐蚀和磨损性能研究
Study on Surface Corrosion and Wear Performance of Single-crystal SiC Based on Metal Electrochemical Corrosion
摘要
Abstract
Aiming at the environmental pollution of the polishing solution in chemical mechanical polishing,a single-crystal SiC chemical mechanical polishing method based on metal electrochemical corrosion is proposed.The Si surface of single-crystal SiC corrosion performance and wear performance of electrochemically corroded were investigated by corrosion experiments and wear experiments.By comparing the corrosion performance of Al,Cu,and Fe metals on the Si face in a Na2SO4 electrolyte solution,it was found that only Al can generate a noticeable corrosion layer.The EDS and XPS analyses of the Si face confirmed that the corrosion is due to the formation of the SiO2 layer.Frictional wear experiments were conducted to investigate the influence of solution composition on the wear behavior of Si face.Increasing the concentration of the Na2SO4 electrolyte solution resulted in higher wear,with a maximum wear value of 7.19 µm2 obtained in 1.00 mol/L Na2SO4 electrolyte solution.In an acidic corrosive solution,the Si face exhibited the highest material removal,with a wear value of 11.97 µm2 achieved at pH=3.The material removal mechanism of single-crystal SiC via metal electrochemical corrosion involved the corrosive reaction involving Al at the cathode,which generated a corrosion current,and the subsequent oxidation of the SiC surface at the anode,thereby forming a SiO2 oxide layer leading to material removal.关键词
化学机械抛光/单晶SiC/金属电化学腐蚀/腐蚀性能/磨损性能Key words
chemical mechanical polishing/single-crystal SiC/metal electrochemical corrosion/corrosion performance/wear performance分类
机械工程引用本文复制引用
胡达,路家斌,阎秋生,骆应荣,雒梓源..基于金属电化学腐蚀的单晶SiC表面腐蚀和磨损性能研究[J].湖南大学学报（自然科学版）,2024,51(4):123-131,9.基金项目
国家自然科学基金资助项目(52175385),National Natural Science Foundation of China(52175385) （52175385）
广东省自然科学基金资助项目(2023A1515010923),Natural Science Foundation of Guangdong Province(2023A1515010923) （2023A1515010923）
攀登计划广东大学生科技创新战略专项(pdjh2023a0157),Special Fund Project for Science and Technology Innovation Strategy in Guangdong Province(pdjh2023a0157) （pdjh2023a0157）
