中国计量大学学报2024，Vol.35Issue(1)：1-6,6.DOI:10.3969/j.issn.2096-2835.2024.01.001
基于几何光学理论的点光源非定域干涉测角分析
Theory analysis of angle measurement by point source non-localized interference based on geometric optics
摘要
Abstract
Aims:Due to the advantages of non-contact,high sensitivity and high accuracy,measurement technology for micro/small angle by the point light source non-localized interference has attracted much attention.This paper aims to solve the shortcomings of existing analysis theories,which are not clear in explaining the mechanism of forming a pair of virtual point light sources on two flat crystal surfaces,and are difficult to be universally applied to multi-surface measuring devices.Methods:Taking the measurement of flat crystal wedge angles as an example,and based on the geometric optics theory,the relationship between the center lateral displacement of interference concentric rings and the wedge angles was derived.The difference between the derived relationship and the literature relationship was studied through visualization.Results:With the exception of the zero point,the wedge angle value given by the modified relationship was slightly smaller,i.e.,the wedge angle deviation was 0.027″ and 0.003″when the center lateral shift was 10 mm and 1 mm,respectively.Conclusions:The analysis method based on geometric optics theory can not only analyze the wedge angle measurement prinple of flat crystal individual components,but can also analyze the angle measurement princple of polyhedral variant structures.It can quantitatively analyze the relationship between the center lateral displacement and the wedge angle,and achieve the simulation of interference concentric rings,enriching the non local interference angle measurement technology of point light sources.关键词
非定域干涉/微小角度/平晶/几何光学Key words
non-localized interference/micro/small angle/optical flat/geometric optics分类
数理科学引用本文复制引用
张宝武,许子杰,施江焕,朱玲,方振远,孙怡,罗贤欢..基于几何光学理论的点光源非定域干涉测角分析[J].中国计量大学学报,2024,35(1):1-6,6.基金项目
国家市场监督管理总局科技计划项目(No.2022MK220,2021MK188),国家重点研发计划项目(No.2023YFF0616203,2021YFF0603300) （No.2022MK220,2021MK188）
