航天器环境工程2024，Vol.41Issue(2)：181-189,9.DOI:10.12126/see.2023124
一种等离子体溯源测量装置设计及性能测试
Design and performance testing of a plasma traceability measurement device
摘要
Abstract
A plasma traceability measurement device was designed in this article to verify the performance of the inductively coupled plasma(ICP)as a calibration source.It is to identify the optimal plasma testing conditions that satisfy the traceability calibration of the Langmuir probe,and to improve the test accuracy.The control variable method was used to investigate the stability and uniformity of electron density and electron temperature,the repeatability of electron density of ICP source under different working conditions.The results show that,when the measurement time is within 5-20 min,the stabilities of electron density and electron temperature of plasmas are better than 99.4%and 98.9%respectively.When the probe inserts into the vacuum chamber 440-480 mm,the uniformities of electron density and electron temperature of plasmas are better than 97.2%and 93.6%respectively.When the discharge power of the plasma source is 100-900 W,the repeatability of electron density is better than 86.6%,most of which is superior to 92%.The proposed research may provide a reference for the future optimization of the plasma diagnostic means.关键词
等离子体源/朗缪尔探针/控制变量法/结构设计/电子密度/电子温度Key words
plasma source/Langmuir probe/control variable method/structural design/electron density/electron temperature分类
数理科学引用本文复制引用
李耀,张韧,贾军伟,王青青,武宇婧,常猛,董学江,郝剑昆,郎昊,李绍飞..一种等离子体溯源测量装置设计及性能测试[J].航天器环境工程,2024,41(2):181-189,9.基金项目
国家自然科学基金项目(编号:U22B2094) （编号:U22B2094）
