量子电子学报2024，Vol.41Issue(2)：278-288,11.DOI:10.3969/j.issn.1007-5461.2024.02.010
深紫外飞秒脉冲准分子激光放大同步特性研究
Synchronization characteristics of deep ultraviolet femtosecond pulse amplified by excimer laser
摘要
Abstract
In order to obtain deep ultraviolet(UV)ultrashort pulses with large energy,deep UV femtosecond seed light is amplified by an ArF excimer amplifier.By measuring the seed light signal and the fluorescence signal of the excimer amplifier,the effect of the delay between the seed light signal and the amplifier discharge signal on the single amplification characteristics of the pulse was investigated under different environments.The results show that the amplification system achieves precise synchronization of seed light and excimer amplifier with low jitter,the maximum pulse energy in air and nitrogen is 197.2 μJ and 312.6 μJ,respectively,and the pulse spreading in nitrogen environment is reduced by 99.2 fs on average compared with in air.It is proved that compared to air environment,nitrogen environment can effectively reduce the energy decay and pulse spreading of deep UV ultrashort pulses,and synchronous jitter has less influence on amplification characteristics.关键词
激光技术/同步特性/准分子放大/深紫外飞秒激光Key words
laser techniques/synchronization characteristics/excimer amplification/deep ultraviolet femtosecond laser分类
信息技术与安全科学引用本文复制引用
范军,杨礼昭,游利兵,戎丹丹,王宏伟,寸超,方晓东..深紫外飞秒脉冲准分子激光放大同步特性研究[J].量子电子学报,2024,41(2):278-288,11.基金项目
国家自然科学基金(41627803),安徽省重点研究和开发计划项目(1804a0802219),深圳市科技计划资助项目(KQTD20170331115422184,JCYJ20210324120207021),中国科学院核心关键技术攻关项目(ZKYXG-2018-04),广东省科技计划项目(2021QN02Z552) （41627803）
