轻工机械2024，Vol.42Issue(2)：8-14,22,8.DOI:10.3969/j.issn.1005-2895.2024.02.002
基于自适应极值的白光干涉信号解调算法研究
White Light Interference Signal Demodulation Algorithm Based on Adaptive Extremum
摘要
Abstract
In order to solve the problems of poor stability and weak anti-interference ability of optical path point positioning using traditional time-domain demodulation algorithms,as well as low efficiency of frequency-domain demodulation algorithms and some methods being limited by scanning sampling step size,a white light interference demodulation algorithm was proposed based on adaptive extremum.It was corrected to a Gaussian envelope curve starting from the statistical laws of interference signals,by weighted averaging the envelope curve of the interference signal.Then,equal optical path points were obtained by Gaussian fitting and interpolation of the envelope curve,thereby obtained depth information of the measurement direction and three-dimensional morphology.Finally,multiple experiments were conducted on the 20 μm standard step sample block.The results showed that the measurement repeatability and accuracy of the proposed algorithm are significantly improved compared to the traditional algorithms.This algorithm provides a better method of repeatability and accuracy in the demodulation of white light interference signal.关键词
白光干涉测量系统/解调算法/自适应极值/高斯包络/干涉信号解调Key words
white light interferometric measurement system/demodulation algorithm/adaptive extremum/Gaussian envelope/interferometric signal demodulation分类
机械制造引用本文复制引用
祖洪飞,陈宁,郭钢祥,朱靖,张翔,陈章位..基于自适应极值的白光干涉信号解调算法研究[J].轻工机械,2024,42(2):8-14,22,8.基金项目
国家重点研发计划课题(2020YFC1522703) （2020YFC1522703）
宁波市重点研发计划暨"揭榜挂帅"项目(2023Z135) （2023Z135）
宁波市重点研发计划暨"揭榜挂帅"项目(2023Z131) （2023Z131）
浙江省市场监督管理局重大科研项目资助项目(20210107) （20210107）
浙江省科技厅重大专项资助项目(2020C01028). （2020C01028）
