太阳能Issue(4)：87-93,7.DOI:10.19911/j.1003-0417.tyn20230419.01
硼扩散设备温度控制系统的研究与实现
RESEARCH AND IMPLEMENTATION OF TEMPERATURE CONTROL SYSTEM FOR BORON DIFFUSION EQUIPMENT
彭浩 1黄心沿 2吴志明 1邹臻峰3
作者信息
- 1. 湖南红太阳光电科技有限公司,长沙 410221||中国电子科技集团第四十八研究所,长沙 410009
- 2. 中国电子科技集团第四十八研究所,长沙 410009||中南大学传感技术研究所,长沙 410083
- 3. 湖南红太阳光电科技有限公司,长沙 410221
- 折叠
摘要
Abstract
In recent years,with the continuous and rapid development of the PV industry,the n-type TOPCon solar cells technology route has been recognized by the market,and production capacity has rapidly expanded.Boron diffusion equipment,as one of the core process equipment for TOPCon solar cells,has received great attention from the market,the temperature control system plays a decisive role in the production process of boron diffusion equipment.This paper compares the square resistance uniformity of silicon wafers obtained by using horizontal and vertical insertion methods in the traditional furnace during the practical application of boron diffusion equipment.It is found that the horizontal insertion method has the problem of high square resistance of the middle layer silicon wafers within the boat,and the square resistance uniformity does not meet the technical requirements.A new type of divisional furnace has been designed,and three types of temperature control system schemes have been proposed.Through process verification,a scheme that meets the technical requirements has been obtained.The research results show that when the divisional furnace is combined with the horizontal insertion method,the temperature control system scheme 3 can meet the technical requirements.关键词
TOPCon太阳电池/硼扩散设备/温度控制系统/插片方式/分区炉体Key words
TOPCon solar cells/boron diffusion equipment/temperature control system/insertion method/divisional furnace分类
信息技术与安全科学引用本文复制引用
彭浩,黄心沿,吴志明,邹臻峰..硼扩散设备温度控制系统的研究与实现[J].太阳能,2024,(4):87-93,7.
