电子科技2024,Vol.37Issue(5):62-70,9.DOI:10.16180/j.cnki.issn1007-7820.2024.05.009
基于相位测量偏折术的透明物体表面缺陷检测
Surface Defect Detection of Transparent Objects Based on Phase Measuring Deflectometry
摘要
Abstract
At present,the traditional method is still used to control the quality of glass,lens and other transpar-ent objects in China,and the traditional visual evaluation method is inefficient.In order to realize automatic detection of surface defects of transparent objects,a transmission detection method based on PMD(Phase Measuring Deflectome-try)is proposed.The structure light fringe pattern is generated by PMD algorithm combined with the new phase shift pattern generation formula,and the fringe pattern is projected to the surface of the measured object using the transmis-sion system.The distorted fringe image after refraction of the measured object is collected by the camera,then the ab-solute phase diagrams are generated,and the defects are extracted by identifying the local distortion in the absolute phase diagram.Through analyzing the reason of false detection caused by periodic misalignment,a method of correc-ting absolute phase periodic misalignment is proposed.The new formula of phase shift pattern generation can also cor-rect periodic misalignment in advance,the combination of the two methods can improve the precision of phase unwrap-ping.A concave and convex lens with a focal length of 300 mm is taken as an example,the experimental results show that the proposed method can accurately extract the local distortion in the absolute phase diagram caused by surface defects with an accuracy of 0.1 mm.关键词
透明物体/表面缺陷自动化检测/相位测量偏折术/结构光条纹图案/透射式系统/相位展开/局部畸变/周期错位Key words
transparent object/automatic detection of surface defects/phase measuring deflectometry/structured light stripe pattern/transmission system/phase unfolding/local distortion/misalignment of periods分类
信息技术与安全科学引用本文复制引用
丁玉洁,周志峰,王勇,王立瑞..基于相位测量偏折术的透明物体表面缺陷检测[J].电子科技,2024,37(5):62-70,9.基金项目
上海市优秀学术/技术带头人计划资助(22XD1433500) Sponsored by Program of ShanghaiAcademic/Technology Research Leader(22XD1433500) (22XD1433500)