计量学报2024，Vol.45Issue(4)：489-495,7.DOI:10.3969/j.issn.1000-1158.2024.04.04
多通道抗串扰式光谱共焦位移测量方法
Multi-channel Anti-crosstalk Spectral Confocal Displacement Measurement Method
摘要
Abstract
Propose a displacement measurement method to address the issue of mutual interference between different confocal points in a scanning spectral confocal measurement system.Maintain the independence between multiple measurement channels by using optical fiber bundles and employ optical switches to switch between measurement channels to prevent interference.The system comprises seven focal points arranged in an equilateral hexagon,with six points positioned at the hexagon's vertices and one focal point at its center,yielding a hexagon side length of 43.27 µm.Displacement measurement experiments indicate an absolute error of less than 0.15 µm across all measurement channels and a range of 0～90 µm.In experiments involving step surfaces,with two steps of 30 µm height difference,the maximum error is 0.16 µm.In sphere radius measurements,all seven channels can measure without the need to move the measurement system or the object being measured.A fitted approximation for a sphere with a radius of 5 mm yields a maximum error of 80.92 µm.Compared with traditional methods,this method shows higher precision and resolution.关键词
几何量测量/光谱共焦/多通道/位移测量/共焦位移Key words
geometric measurement/spectral confocal/multi-channel/displacement measurement/confocal displacement分类
通用工业技术引用本文复制引用
孙振国,李加福,罗明哲,李轶凡,胡佳成..多通道抗串扰式光谱共焦位移测量方法[J].计量学报,2024,45(4):489-495,7.基金项目
国家自然科学基金(52205579) （52205579）
国家市场监管总局能力建设(ANL2207) （ANL2207）
