铜业工程Issue(2)：66-72,7.DOI:10.3969/j.issn.1009-3842.2024.02.010
轧制变形量及退火工艺对钼靶材显微组织的影响
Microstructure of Molybdenum Target with Different Rolling Deformations and Annealing Processes
摘要
Abstract
The relationship between the rolling and annealing processes and the density,grain size and crystal orientation of molybde-num targets was studied.Molybdenum target was rolled under different process conditions of 60%～90%deformation,and annealed at different temperatures of 900～1200℃.The physical and chemical properties and structure of molybdenum target were characterized by precision measurement,metallographic observation,scanning electron microscope imaging(SEM),X-ray diffraction(XRD),electron back scattering diffraction(EBSD)and other methods.The characteristics of molybdenum target,such as density,grain size and crystal orientation,were analyzed and discussed,and the best rolling process of molybdenum target was determined.The results show that when the rolling deformation was 80%～85%,the density of molybdenum target reached 99.8%.After vacuum annealing at 1000℃,the microstructure uniformity was the best,the average grain size was 57.1 μm,and the target surface showed a significant{100}crystal surface preferred orientation.关键词
钼靶材/轧制变形量/退火/织构/显微组织Key words
molybdenum target/rolling deformation/anneal/texture/microstructure分类
矿业与冶金引用本文复制引用
冯永山,陈飞鹏,李诵斌,李雄斌,李阁平,洪志远,陈岩..轧制变形量及退火工艺对钼靶材显微组织的影响[J].铜业工程,2024,(2):66-72,7.基金项目
新能源汽车扁线用高性能高纯无氧铜杆研究与开发项目(S2022ZPYD0005)资助 （S2022ZPYD0005）
