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A multichannel thermal bubble-actuated impedance flow cytometer with on-chip TIA based on CMOS-MEMS

Shengxun Cai Jianqing Nie Kun Wang Yimin Guan Demeng Liu

Journal of Semiconductors2024，Vol.45Issue(5)：P.41-49,9.

Journal of Semiconductors2024，Vol.45Issue(5)：P.41-49,9.DOI:10.1088/1674-4926/45/5/052201

A multichannel thermal bubble-actuated impedance flow cytometer with on-chip TIA based on CMOS-MEMS

Shengxun Cai ¹Jianqing Nie ¹Kun Wang ²Yimin Guan ³Demeng Liu³

作者信息

1. School of Microelectronics,Shanghai University,Shanghai 201800,China
2. Shanghai AURE Technology Limited Company,Shanghai 201800,China
3. School of Microelectronics,Shanghai University,Shanghai 201800,China Shanghai AURE Technology Limited Company,Shanghai 201800,China
折叠

摘要

关键词

EIS/flow cytometry/CMOS-MEMS/thermal bubble/lab-on-chip

分类

信息技术与安全科学

引用本文复制引用

Shengxun Cai,Jianqing Nie,Kun Wang,Yimin Guan,Demeng Liu..A multichannel thermal bubble-actuated impedance flow cytometer with on-chip TIA based on CMOS-MEMS[J].Journal of Semiconductors,2024,45(5):P.41-49,9.

基金项目

supported by the Key Project of the National Natural Science Foundation of China(Grant No.82130069). （Grant No.82130069）

Journal of Semiconductors

OACSTPCDEI

ISSN：1674-4926

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