实验科学与技术2024，Vol.22Issue(2)：41-46,6.DOI:10.12179/1672-4550.20230433
超薄非晶氧化物半导体薄膜的制备及光学带隙调控综合实验设计
Comprehension Experimental Design for Preparation and Optical Band Gap Control of Ultrathin Amorphous Oxide Semiconductor Films
摘要
Abstract
In order to enhance students'Innovation literacy and integrated scientific research content into experimental teaching,this work designs"experiments on the preparation and optical band gap control of ultrathin amorphous oxide semiconductor films".InSnO films were fabricated on quartz substrates by magnetron sputtering,and several characterization methods were used to study the effects of thickness on the crystal structure,surface topography and optical band gap of the films.The results show that the thickness of film affects the surface roughness of the film,and the optical band gap of the films decreases with increasing film thickness.This innovative experiment covers material preparation,characterization and mechanism analysis,involving semiconductor,materials science,optoelectronics disciplines,and combined with actual scientific research content,which improves students'enthusiasm for scientific research,cultivate students'innovative thinking,and improves their ability to combine theory with practice.关键词
光学带隙/铟锡氧化物薄膜/磁控溅射/实验设计Key words
optical band gap/InSnO film/magnetron sputtering/experimental design分类
物理学引用本文复制引用
许磊,张新楠,梁茹钰,胡梦真,宋增才,罗世钧..超薄非晶氧化物半导体薄膜的制备及光学带隙调控综合实验设计[J].实验科学与技术,2024,22(2):41-46,6.基金项目
国家自然科学基金(11574083,61904054) （11574083,61904054）
教育部产学合作协同育人项目(202102575009,220904090161130) （202102575009,220904090161130）
河南省高等教育教学改革研究与实践重点项目(2021SJGLX165) （2021SJGLX165）
华北水利水电大学教育教学改革研究与实践项目(2021070). （2021070）
