材料科学与工程学报2024，Vol.42Issue(2)：173-178,6.DOI:10.14136/j.cnki.issn1673-2812.2024.02.001
铝铒共掺氧化锌薄膜中氧含量对铒离子发光的影响
Effect of Oxygen Content on Luminescence of Er3+ Ions in Al/Er Co-doped ZnO Films
摘要
Abstract
Optoelectronic properties of Al-Er co-doped ZnO films and electroluminescent devices deposited by magnetron sputtering with various oxygen contents were investigated.Experimental results exhibit that the increase of oxygen content leads to the enhancement of the optical activity of Er3+ ions and diminishes electron traps in films.In addition,a high oxygen content causes to a decrease in the crystallinity of films due to the energy loss caused by the collision of spattered particles with oxygen during the deposition.Because oxygen atoms fill the oxygen vacancies that function as donors,npn heterojunction devices,which significantly depend on the concentration of majority carriers,achieve the highest intensity of electroluminescence under pure argon circumstances.关键词
铝铒共掺氧化锌/溅射气氛/电致发光/氧空位Key words
Al/Er co-doped ZnO/Sputtering atmosphere/Electroluminescence/Oxygen vacancy分类
通用工业技术引用本文复制引用
王源,杨德仁,李东升..铝铒共掺氧化锌薄膜中氧含量对铒离子发光的影响[J].材料科学与工程学报,2024,42(2):173-178,6.基金项目
国家重点研发计划资助项目(2018YFB2200102) （2018YFB2200102）
国家自然科学基金资助项目(61874095,61721005) （61874095,61721005）
