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铝铒共掺氧化锌薄膜中氧含量对铒离子发光的影响OA北大核心CSTPCD

Effect of Oxygen Content on Luminescence of Er3+ Ions in Al/Er Co-doped ZnO Films

中文摘要英文摘要

研究在不同氧气含量条件下通过磁控溅射沉积的铝铒共掺氧化锌薄膜及电致发光器件的光电性能.实验发现氧气含量的提高有利于增强Er3+离子的光学活性并降低薄膜中电子陷阱的浓度.另外,由于沉积过程中溅射出的粒子与氧气碰撞导致能量损失,高氧气含量会引起薄膜结晶性下降.在电致发光中,由于氧填充了作为施主的氧空位,强烈依赖于多子浓度的npn异质结器件在纯氩条件下才能获得最强的电致发光.

Optoelectronic properties of Al-Er co-doped ZnO films and electroluminescent devices deposited by magnetron sputtering with various oxygen contents were investigated.Experimental results exhibit that the increase of oxygen content leads to the enhancement of the optical activity of Er3+ ions and diminishes electron traps in films.In addition,a high oxygen content causes to a decrease in the crystallinity of films due to the energy loss caused by the collision of spattered particles with oxygen during the deposition.Because oxygen atoms fill the oxygen vacancies that function as donors,npn heterojunction devices,which significantly depend on the concentration of majority carriers,achieve the highest intensity of electroluminescence under pure argon circumstances.

王源;杨德仁;李东升

浙江大学 材料科学与工程学院/硅及先进半导体材料全国重点实验室, 浙江 杭州 310027

铝铒共掺氧化锌溅射气氛电致发光氧空位

Al/Er co-doped ZnOSputtering atmosphereElectroluminescenceOxygen vacancy

《材料科学与工程学报》 2024 (002)

173-178 / 6

国家重点研发计划资助项目(2018YFB2200102);国家自然科学基金资助项目(61874095,61721005)

10.14136/j.cnki.issn1673-2812.2024.02.001

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