材料科学与工程学报2024，Vol.42Issue(2)：331-339,9.DOI:10.14136/j.cnki.issn1673-2812.2024.02.022
机器学习在化学气相沉积中的应用研究进展
Advances on Application of Machine Learning in Chemical Vapor Deposition
摘要
Abstract
Chemical vapor deposition technology is a chemical technology for preparing inorganic materials developed in recent decades.With the development of machine learning technology,it also plays a significant role in the field of chemical vapor deposition.Based on this,this paper firstly outlines the principles of chemical vapor deposition and the development of machine learning,then analyzes the typical applications of machine learning in chemical vapor deposition,and finally summarizes and analyzes the development trend of future applications.关键词
化学气相沉积/无机材料/薄膜/机器学习Key words
Chemical vapor deposition/Inorganic material/Film/Machine learning分类
信息技术与安全科学引用本文复制引用
谢炜,明帅强,夏洋,周兰江..机器学习在化学气相沉积中的应用研究进展[J].材料科学与工程学报,2024,42(2):331-339,9.基金项目
中科院关键技术团队资助项目(GJJSTD20200003) （GJJSTD20200003）
