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基于PDMS的FPI高灵敏度温度与气压传感器OA北大核心CSTPCD

High Sensitivity Temperature and Gas Pressure Sensor Composed of Two Parallel Fabry-Perot Interferometers Based on PDMS

中文摘要英文摘要

为了满足生产实际对高灵敏度温度和气压测量的需要,利用聚二甲基硅氧烷(PDMS)设计了一款新型的高灵敏度温度与气压光纤传感器.传感器由两个自由光谱范围相近的法布里-珀罗干涉仪(FPI)并联构成,两个FPI由单模光纤端面涂覆PDMS制成.由于PDMS具有优良的热敏性和弹性,基于PDMS的FPI具有较好的温度和压力敏感性.将两个自由光谱范围相近的FPI并联后,形成一个光学游标效应传感器,进一步放大了传感器灵敏度.实验结果表明传感器的温度和气压灵敏度分别为 2.789 3 nm/℃和 15.507 9 nm/MPa,而单个FPI的温度与气压灵敏度分别为 0.250 8 nm/℃和 1.518 1 nm/MPa,灵敏度被分别放大了11.1 和10.2 倍.该传感器结构简单、制作容易、尺寸紧凑、成本低、灵敏度高、重复性和稳定性好,具有一定的实际应用价值.

To meet the needs of high sensitivity temperature and pressure measurement in industrial production,a novel high sensitivity temperature and gas pressure optical fiber sensor is designed by using polydimethylsiloxane(PDMS).The sensor is composed of two Fabry-Perot interferometers(FPI)with similar free spectrum range in parallel.Two FPIs are fabricated by coating PDMS on the end face of single mode fiber.Because of the excellent thermal sensitivity and elasticity of PDMS,PDMS-based FPI has good temperature and pressure sensitivity.When two FPIs with similar free spectrum range are connected in parallel,a Vernier effect sensor will be formed,which can further amplify the sensitivity of the sensor.The experimental results show that the values temperature and pressure sensitivity of the sensor are 2.789 3 nm/℃and 15.507 9 nm/MPa respectively,while the values temperature and pressure sensitivity those of a single FPI are 0.250 8 nm/℃and 1.518 1 nm/MPa respectively,and the values of sensitivities of the sensor are amplified by 11.1 and 10.2 times respectively.The sensor has the advantages of simple structure,easy fabrication,compact size,low cost,high sensitivity,good repeatability and stability,and it has certain practical application value.

曹庭水;胡传菊;李丽;方婷;李宏;江超

湖北师范大学物理与电子科学学院,湖北 黄石 435002

电子信息工程

光纤传感器光纤法布里-珀罗干涉仪,光学游标效应气压与温度PDMS

optical fiber sensoroptical fiber Fabry-Perot interferometeroptical Vernier effecttemperature and gas pressurePolydime-thylsiloxane(PDMS)

《传感技术学报》 2024 (004)

581-588 / 8

2019年湖北省教育厅项目(B2019124);2024年湖北省自然基金创新发展联合基金项目(2024AFD001)

10.3969/j.issn.1004-1699.2024.04.004

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