传感技术学报2024,Vol.37Issue(4):581-588,8.DOI:10.3969/j.issn.1004-1699.2024.04.004
基于PDMS的FPI高灵敏度温度与气压传感器
High Sensitivity Temperature and Gas Pressure Sensor Composed of Two Parallel Fabry-Perot Interferometers Based on PDMS
摘要
Abstract
To meet the needs of high sensitivity temperature and pressure measurement in industrial production,a novel high sensitivity temperature and gas pressure optical fiber sensor is designed by using polydimethylsiloxane(PDMS).The sensor is composed of two Fabry-Perot interferometers(FPI)with similar free spectrum range in parallel.Two FPIs are fabricated by coating PDMS on the end face of single mode fiber.Because of the excellent thermal sensitivity and elasticity of PDMS,PDMS-based FPI has good temperature and pressure sensitivity.When two FPIs with similar free spectrum range are connected in parallel,a Vernier effect sensor will be formed,which can further amplify the sensitivity of the sensor.The experimental results show that the values temperature and pressure sensitivity of the sensor are 2.789 3 nm/℃and 15.507 9 nm/MPa respectively,while the values temperature and pressure sensitivity those of a single FPI are 0.250 8 nm/℃and 1.518 1 nm/MPa respectively,and the values of sensitivities of the sensor are amplified by 11.1 and 10.2 times respectively.The sensor has the advantages of simple structure,easy fabrication,compact size,low cost,high sensitivity,good repeatability and stability,and it has certain practical application value.关键词
光纤传感器/光纤法布里-珀罗干涉仪,光学游标效应/气压与温度/PDMSKey words
optical fiber sensor/optical fiber Fabry-Perot interferometer/optical Vernier effect/temperature and gas pressure/Polydime-thylsiloxane(PDMS)分类
信息技术与安全科学引用本文复制引用
曹庭水,胡传菊,李丽,方婷,李宏,江超..基于PDMS的FPI高灵敏度温度与气压传感器[J].传感技术学报,2024,37(4):581-588,8.基金项目
2019年湖北省教育厅项目(B2019124) (B2019124)
2024年湖北省自然基金创新发展联合基金项目(2024AFD001) (2024AFD001)