传感技术学报2024，Vol.37Issue(4)：589-596,8.DOI:10.3969/j.issn.1004-1699.2024.04.005
用于特殊环境的薄膜应变计的制备与表征
Fabrication And Characterization of Thin Film Strain Gauge for Strain Measurement Under Special Environment
摘要
Abstract
RF sputtering is used to create Karma alloy thin film strain gauges on alumina substrates.Karma alloy thin films'changes in e-lectrical characteristics and strain properties at various annealing temperatures are evaluated,and it is determined how annealing tempera-ture affects the surface morphology and crystal structure of Karma alloy thin films.The results demonstrate that as the annealing tempera-ture increases,the resistivity of the Karma alloy thin films gradually decreases,and its temperature coefficient of resistance gradually in-creases.Karma thin film strain gages are discovered to have the lowest TCR of 59.9×10-6/℃under room temperature.After 200℃an-nealing process,the Karma alloy thin films achieve the gage factor of 2.2,and the TCR of 64.4×10-6/℃.The piezoresistive characteristic of the thin film changes slightly after experiments of temperature humidity cycling,salt spray,and molding,it has ability to withstand the harsh conditions of the sea.关键词
磁控溅射/薄膜应变计/电阻温度系数/应变因子/环境实验Key words
magnetron sputtering/thin-film strain gauge/resistance temperature coefficient/strain factor/environmental experiments分类
信息技术与安全科学引用本文复制引用
张丛春,康志鹏,雷鹏,闫博..用于特殊环境的薄膜应变计的制备与表征[J].传感技术学报,2024,37(4):589-596,8.基金项目
2023年度"慧眼行动"项目 （）
