传感技术学报2024，Vol.37Issue(4)：603-611,9.DOI:10.3969/j.issn.1004-1699.2024.04.007
计及边缘效应的差动圆柱面电容式倾角传感器的输出特性
Output Characteristics of Tilt Sensor with Differential Cylindrical Surface Capacitor in Case of Taking Edge Effect into Account
摘要
Abstract
In order to study the output characteristics of tilt sensor with differential cylindrical surface capacitor in case of taking edge effect into account,the electric field in the differential cylindrical surface capacitorby is discussed combining conformal method,Green's function method and computer numerical simulation,the functional formula of its capacitance changing with tilt angle is given,the output characteristic curve of the sensor is drawn,the factors affecting the linearity and sensitivity of the sensor are analyzed,and the ways to improve the output characteristics of the sensor are pointed out.关键词
差动圆柱面电容器/倾角传感器/边缘效应/保角变换法/格林函数法/数值模拟/输出特性Key words
differential cylindrical surface capacitor/tilt sensor/edge effect/conformal mapping method/green's function method/numerical simulation/output characteristics分类
信息技术与安全科学引用本文复制引用
王福谦..计及边缘效应的差动圆柱面电容式倾角传感器的输出特性[J].传感技术学报,2024,37(4):603-611,9.基金项目
2020年度四川省教育科研课题项目(SCJG20A275) （SCJG20A275）
四川西南航空职业学院2024年度校级科研课题项目(XNHY-2024-01) （XNHY-2024-01）
