计及边缘效应的差动圆柱面电容式倾角传感器的输出特性OA北大核心CSTPCD

In order to study the output characteristics of tilt sensor with differential cylindrical surface capacitor in case of taking edge effect into account,the electric field in the differential cylindrical surface capacitorby is discussed combining conformal method,Green's function method and computer numerical simulation,the functional formula of its capacitance changing with tilt angle is given,the output characteristic curve of the sensor is drawn,the factors affecting the linearity and sensitivity of the sensor are analyzed,and the ways to improve the output characteristics of the sensor are pointed out.