金刚石与磨料磨具工程2024，Vol.44Issue(2)：143-150,8.DOI:10.13394/j.cnki.jgszz.2023.0039
多线摇摆往复式线锯切割蓝宝石法向力试验研究
E xperimental study on normal force of cutting sapphire with multi-wire swing reciprocating wire saw
摘要
Abstract
Multi-wire swing reciprocating sawing technology is the main machining method used to cut sapphire crys-tal bars into wafer substrates,while normal force is an important index that reflects the processing stability.In this pa-per,the normal force(Fn)during multi-wire swing reciprocating wire saw cutting sapphire crystal bars was measured,and the change in normal force at different positions and cutting depths of the sapphire crystal bars was tracked.The in-fluence of various process parameters on the stability of the machining process was tracked by using the rangeability of normal force(ΔFn)as the index.The experimental results show that Fn is closely correlated with the reciprocating motion of the wire saw and the rocking motion of the workpiece,and ΔFn in the front of the sapphire crystal bar is sig-nificantly different from that in the middle and back.Process parameters such as the wire saw speed(Vs),maximum swing angle(θmax),single piece wire consumption(Md),tensioning force(Fw),and total cutting time(7)have different effects on ΔFn.The fluctuation degree of ΔFn is closely related to the wear of the wire saw.关键词
多线摇摆往复式线锯切割/蓝宝石/法向力/磨损/加工稳定性Key words
multi-wire swing reciprocating sawing technology/sapphire/normal force/wear and tear/machining sta-bility分类
机械制造引用本文复制引用
刘亿圣,黄辉,王兰青,廖信江..多线摇摆往复式线锯切割蓝宝石法向力试验研究[J].金刚石与磨料磨具工程,2024,44(2):143-150,8.基金项目
国家自然科学基金(U22A20198) （U22A20198）
福建省自然科学基金(2022J05059) （2022J05059）
教育部创新团队滚动计划(IRT_17R41) （IRT_17R41）
福建省智能制造科技经济融合服务平台. （）
