30at%铝钪合金靶材的制备与显微组织OA

In order to solve the problems of high oxygen content,high impurities,alloy phase separation and low density in the traditional powder metallurgy preparation of 30at%Al Sc target,a 30at%Al Sc alloy material was prepared with high-purity elemental Al and Sc as raw materials by the process of suspension melting water cooling casting gas atomization and hot pressing.The influence of the change of trace Sc content on the XRD,micro morphology and Al2Sc and Al3Sc ratio of the target was studied;The oxygen content and impurities of the target were measured by oxygen nitrogen analyzer,ICP-OES analyzer.The micro morphology and phase structure of the target block were characterized by SEM and X-ray diffraction.The test results show that 30at%aluminum scandium targets with oxygen content less than 1500ppm,purity than 3.5N,just Al3Sc and Al2Sc two-phase structure,average grain size of aluminum scandium particles less than 10 μ m,and density greater than 99%were prepared by suspension melting,water-cooled casting,gas atomization and hot-pressing sintering process.When the Sc content in the target increased from 30at%to 30.5at%,the ratio of Al2Sc to Al3Sc changed from 60:40 to 66:34,Al2Sc ratio increased,Al3Sc decreased significantly,and target 100W stress decreased.