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30at%铝钪合金靶材的制备与显微组织

蔡新志 苏紫珊 冉成义 童培云 朱刘

世界有色金属Issue(4):1-3,3.
世界有色金属Issue(4):1-3,3.

30at%铝钪合金靶材的制备与显微组织

Microstructure and preparation of the 30at% Aluminum scandium target

蔡新志 1苏紫珊 2冉成义 2童培云 3朱刘1

作者信息

  • 1. 先导薄膜材料(广东)有限公司,广东 清远 511517||广东先导稀材股份有限公司,国家稀散金属工程技术研究中心,广东 清远 511517
  • 2. 先导薄膜材料(广东)有限公司,广东 清远 511517
  • 3. 先导薄膜材料有限公司,安徽 合肥 230000
  • 折叠

摘要

Abstract

In order to solve the problems of high oxygen content,high impurities,alloy phase separation and low density in the traditional powder metallurgy preparation of 30at%Al Sc target,a 30at%Al Sc alloy material was prepared with high-purity elemental Al and Sc as raw materials by the process of suspension melting water cooling casting gas atomization and hot pressing.The influence of the change of trace Sc content on the XRD,micro morphology and Al2Sc and Al3Sc ratio of the target was studied;The oxygen content and impurities of the target were measured by oxygen nitrogen analyzer,ICP-OES analyzer.The micro morphology and phase structure of the target block were characterized by SEM and X-ray diffraction.The test results show that 30at%aluminum scandium targets with oxygen content less than 1500ppm,purity than 3.5N,just Al3Sc and Al2Sc two-phase structure,average grain size of aluminum scandium particles less than 10 μ m,and density greater than 99%were prepared by suspension melting,water-cooled casting,gas atomization and hot-pressing sintering process.When the Sc content in the target increased from 30at%to 30.5at%,the ratio of Al2Sc to Al3Sc changed from 60:40 to 66:34,Al2Sc ratio increased,Al3Sc decreased significantly,and target 100W stress decreased.

关键词

铝钪靶材/悬浮熔炼/水冷浇铸/热压烧结

Key words

Aluminum scandium target/Suspension melting/Water-cooled casting/Hot pressing

分类

矿业与冶金

引用本文复制引用

蔡新志,苏紫珊,冉成义,童培云,朱刘..30at%铝钪合金靶材的制备与显微组织[J].世界有色金属,2024,(4):1-3,3.

基金项目

国家稀散金属工程技术中心项目(2012FU125Q15). (2012FU125Q15)

世界有色金属

1002-5065

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