基于网格的多目标模板匹配晶粒位置检测方法OA北大核心CSTPCD
Grid-based Multi-targets Template Matching Die Position Detection Method
针对传统方法中晶粒位置检测的耗时长、精度低等局限性,提出一种基于网格的多目标模板匹配晶粒位置检测方法.通过改进传统的模板匹配方法,结合非极大值抑制算法,将芯片晶粒的检测速度和精度提高.实验结果表明:该算法在单一同种晶粒的算法识别率能够达到97％以上,单张图像耗时＜200 ms,能够克服明暗不同造成的检测困难,达到技术指标要求.
To address the limitations of traditional methods in terms of long detection time and low accuracy,a multi-objective template matching algorithm detecting position of die based on grid is proposed.By improving the traditional template matching method and combining with non-maximum suppression algorithm,the detection speed and accuracy of chip dice are improved.Experimental results show that the proposed algorithm has a recognition rate of over 97％for a single same die,and the single image processing time does not exceed 200 ms.It can overcome the detection difficulties caused by different brightness and meet the technical specifications.
周书辰;陈晓荣;王子旋
上海理工大学光电信息与计算机工程学院,上海 200093
光电检测晶粒位置检测机器视觉非极大值抑制网格多目标模板匹配
photoelectric detectiondie position detectionmachine visionnon-maximum suppressiongridmulti-target template matching
《计量学报》 2024 (005)
639-645 / 7
国家自然科学基金(52175513)
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