理化检验-物理分册2024，Vol.60Issue(4)：76-77,2.DOI:10.11973/lhjy-wl202404019
扫描电镜故障分析与维修实例
Scanning electron microscope failure analysis and maintenance examples
孙秋香 1卢慧粉 1宋鹏 1李丹丹1
作者信息
- 1. 济宁市质量计量检验检测研究院,济宁 272000
- 折叠
摘要
Abstract
Aiming at the failure problems in the actual use of field emission scanning electron microscope,the causes of the failure were analyzed in detail,and the solution to the failure of the scanning electron microscope was given in combination with the actual situation.The results show that the main reason for the two failures was that when the scanning electron microscope was turned off and turned on again,the instantaneous voltage or current of the boot caused some damage to the components on the equipment,which eventually led to the failure of the scanning electron microscope boot.The results could provide strong technical support for the testers.关键词
扫描电镜/故障/瞬间电压/电源控制系统/高压系统Key words
scanning electron microscope/failure/instantaneous voltage/power control system/high voltage system分类
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孙秋香,卢慧粉,宋鹏,李丹丹..扫描电镜故障分析与维修实例[J].理化检验-物理分册,2024,60(4):76-77,2.
