四川大学学报（自然科学版）2024，Vol.61Issue(3)：290-296,7.DOI:10.19907/j.0490-6756.2024.035002
一步TCVD法制备大面积碳纳米管冷阴极及其场致发射性能研究
Preparation of large area carbon nanotubes cold cathode by one-step TCVD and its performance on field emission
摘要
Abstract
An innovative one-step Thermal Chemical Vapor Deposition(TCVD)method is presented for the synthesis of large-area(1 cm2)carbon nanotubes(CNTs)directly on silicon substrates by using ferrocene pyrolysis.By precisely controlling the pyrolysis temperature of ferrocene within the range of 650～1000℃,optimal ferrocene to carbon conversion efficiency and high-quality carbon nanotubes with excellent crystallin-ity are achieved.The consequential impact of varying pyrolysis temperatures on the microstructure of carbon nanotubes and their field emission performance is thoroughly investigated.The results of the field emission ex-periments demonstrate that the carbon nanotubes synthesized under the optimized pyrolysis temperature(850℃)exhibit outstanding field emission characteristics,with impressive turn-on field(10 μA/cm2)and threshold field(1 mA/cm2)values of 1.32 V/μm and 2.64 V/μm,respectively.Furthermore,these CNTs display a remarkable maximum current density of 14.51 mA/cm2 and a field enhancement factor of 13 267.The proposed one-step fabrication method,which eliminates the need for etching gas or photolithography pat-terning processes,not only ensures safety and cost-effectiveness but also allows for high reproducibility.As a result,it holds significant potential for utilization in the field emission cold cathodes of carbon nanotubes.关键词
碳纳米管/化学气相沉积法/二茂铁/热解温度/场致发射Key words
Carbon nanotube/Chemical vapor deposition(CVD)/Ferrocene/Pyrolysis temperature/Field emission分类
数理科学引用本文复制引用
孙泽奇,薛嫱,王辉,张远鹏,唐永亮,吕文梅,刘庆想,欧凯,夏钰东,张彦博..一步TCVD法制备大面积碳纳米管冷阴极及其场致发射性能研究[J].四川大学学报（自然科学版）,2024,61(3):290-296,7.基金项目
中央高校基本科研业务费(2682023GF027) （2682023GF027）
光电信息技术教育部重点实验室(天津大学)开放基金(2023KFKT014) （天津大学）
