无机材料学报2024，Vol.39Issue(5)：525-530,6.DOI:10.15541/jim20230567
溶胶-凝胶SiO2减反膜的制备与光学性能研究
Preparation and Optical Properties of Sol-Gel SiO2 Antireflective Films
摘要
Abstract
Base-catalyzed sol-gel porous SiO2 antireflective film,an important part of high power laser(such as"Shenguang Ⅱ"high power laser)facilities,has excellent optical properties and laser damage resistance.However,its low binding strength with optical components can lead to the film frustrated with contact destruction.Based on this antireflective film,a double-layer SiO2 antireflective film(SiO2-MTES)was prepared with improved mechanical strength by coating a thin dense SiO2 film on its surface using dip coating method.Then the SiO2-MTES was compared with a commonly used single-layer ammonia cured SiO2 antireflective film(SiO2-HMDS).Results indicate that the peak transmittance of the fused quartz substrate coated with SiO2-MTES reaches greater than 99.6％at about 800 nm and the zero probability laser damage threshold is measured to be 51.9 J/cm2(1064 nm,9.1 ns)by 1-on-1 laser induced damage threshold testing method,equivalent to the performances of the fused quartz substrate with SiO2-HMDS.Meanwhile,the contact angle between SiO2-MTES and water reaches 117.3°,and the transmittance stability of the SiO2-MTES is good in the high humidity environment with relative humidity greater than 90％.Results of multi-wiping experiments show that the friction-resistant mechanical strength of SiO2-MTES is significantly better than that of SiO2-HMDS,which effectively improves the binding strength between the film and the optical components.关键词
溶胶-凝胶/减反膜/SiO2/机械强度Key words
Sol-Gel/antireflective film/SiO2/mechanical strength分类
数理科学引用本文复制引用
沈斌,张旭,熊怀,李海元,谢兴龙..溶胶-凝胶SiO2减反膜的制备与光学性能研究[J].无机材料学报,2024,39(5):525-530,6.基金项目
国家自然科学基金(12074399) （12074399）
中国科学院战略性先导科技专项A类(XDA25020305)National Natural Science Foundation of China(12074399) （XDA25020305）
Strategic Priority Research Program of Chinese Academy of Sciences(XDA25020305) （XDA25020305）
