On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics
On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics
摘要
关键词
Temperature control/Low-power electronics/On-chip micro temperature controller/Freestanding thermoelectric nano films/Temperature-sensitive componentsKey words
Temperature control/Low-power electronics/On-chip micro temperature controller/Freestanding thermoelectric nano films/Temperature-sensitive components引用本文复制引用
Qun Jin,Tianxiao Guo,Nicolás Pérez,Nianjun Yang,Xin Jiang,Kornelius Nielsch,Heiko Reith..On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics[J].纳微快报（英文）,2024,16(7):98-108,11.基金项目
The authors thank D.Berger,D.Hofmann and C.Kupka in IFW Dresden for helpful technical support.H.R.acknowledges funding from the DFG(Deutsche Forschungsge-meinschaft)within grant number RE3973/1-1.Q.J.,H.R.and K.N.conceived the work.With the support from N.Y.and X.J.,Q.J.and T.G.fabricated the thermoelectric films and conducted the struc-tural and compositional characterizations.Q.J.prepared microchips and fabricated the on-chip micro temperature controllers.Q.J.and N.P.carried out the temperature-dependent material and device performance measurements.Q.J.and H.R.performed the simu-lation and analytical calculations.Q.J.,H.R.and K.N.wrote the manuscript with input from the other coauthors.All the authors discussed the results and commented on the manuscript.Open Access funding enabled and organized by Projekt DEAL. （Deutsche Forschungsge-meinschaft）
