中国电机工程学报2024，Vol.44Issue(11)：4579-4588,后插1,11.DOI:10.13334/j.0258-8013.pcsee.230256
基于原子光谱Stark展宽高压放电等离子体电子密度计算
Method for Calculating Plasma Electron Density Based on Stark Broadening of Atomic Spectrum
摘要
Abstract
The Stark broadening method based on the atomic spectrum is considered one of the most crucial techniques for determining plasma electron density.However,this method is intricate and it involves numerous parameters.Simplified approaches are often employed for calculation.The accuracy of electron density is reduced using simplified methods.To improve the accuracy of calculation,this paper designs and develops a method and a program for electron density analysis based on a non-simplified and precise method of calculating Stark broadening.The basic idea is to separate the Gaussian broadening and Lorentzian broadening from the Voigt line of spectrum by using the complex error function and separate the Stark broadening after fine calculation of each broadening component based on spectral lines and environmental parameters,so as to obtain the electron density under corresponding conditions.The electron densities obtained by measuring microwave plasma jet,pulsed dielectric barrier discharge,and pulsed spark discharge are on the order of 1014,1015,and 1017 cm-3,respectively.It is found that the accuracy of electron density calculation varies greatly when different discharge forms are selected.Through error analysis,it is found that environmental parameters such as temperature,pressure,and atomic properties all have effects on electron density estimation,and considering van der Waals broadening can significantly improve the accuracy of electron density calculation.关键词
Stark展宽/等离子体电子密度/发射光谱Key words
Stark broadening/plasma electron density/optical emission spectroscopy分类
能源科技引用本文复制引用
曾鑫,张帅,白晗,章程,邵涛..基于原子光谱Stark展宽高压放电等离子体电子密度计算[J].中国电机工程学报,2024,44(11):4579-4588,后插1,11.基金项目
国家杰出青年科学基金项目(51925703) （51925703）
国家自然科学基金(面上项目)(52077205) （面上项目）
中国科学院青年创新促进会(2022136). National Science Fund for Distinguished Young Scholars(51925703) （2022136）
National Natural Science Foundation of China(General Program)(52077205) （General Program）
Youth Innovation Promotion Association CAS(2022136). （2022136）
