哈特曼-夏克波前传感器高精度球面波标定方法研究OA北大核心CSTPCD

To address the issues of low measurement accuracy and insufficient stability in traditional calibra-tion methods for Shack-Hartmann wavefront sensors(SHWFS),we propose a high-precision absolute calib-ration method using spherical waves generated by sensor.A high-precision calibration method for spherical waves was obtained through theoretical derivation.Combined with the constructed spherical wave calibra-tion experimental device,high-precision calibration was performed on the SHWFS with sub apertures of 128×128.The structural parameters of the SHWFS(f,w,and L0)are calculated precisely.The measurement accuracy of the SHWFS is verified after calibration.The experimental results demonstrate that by using this method to calibrate the SHWFS,its wavefront recovery accuracy reaches a PV of 1.376×10-2λ and an RMS of 4×10-3λ(where λ=625 nm),respectively.Additionally,its repeatability accuracy reaches a PV of 3.2×10-3λ and an RMS of 9.76×10-4λ(where λ=625 nm),respectively.These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aper-ture.