中国光学（中英文）2024，Vol.17Issue(3)：521-527,7.DOI:10.37188/CO.2023-0148
哈特曼-夏克波前传感器高精度球面波标定方法研究
High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor
摘要
Abstract
To address the issues of low measurement accuracy and insufficient stability in traditional calibra-tion methods for Shack-Hartmann wavefront sensors(SHWFS),we propose a high-precision absolute calib-ration method using spherical waves generated by sensor.A high-precision calibration method for spherical waves was obtained through theoretical derivation.Combined with the constructed spherical wave calibra-tion experimental device,high-precision calibration was performed on the SHWFS with sub apertures of 128×128.The structural parameters of the SHWFS(f,w,and L0)are calculated precisely.The measurement accuracy of the SHWFS is verified after calibration.The experimental results demonstrate that by using this method to calibrate the SHWFS,its wavefront recovery accuracy reaches a PV of 1.376×10-2λ and an RMS of 4×10-3λ(where λ=625 nm),respectively.Additionally,its repeatability accuracy reaches a PV of 3.2×10-3λ and an RMS of 9.76×10-4λ(where λ=625 nm),respectively.These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aper-ture.关键词
哈特曼-夏克波前传感器/绝对标定/球面波前Key words
Shack-Hartmann wavefront sensor/absolute calibration/spherical wavefront分类
信息技术与安全科学引用本文复制引用
包明帝,史国华,邢利娜,何益..哈特曼-夏克波前传感器高精度球面波标定方法研究[J].中国光学（中英文）,2024,17(3):521-527,7.基金项目
国家自然科学基金资助项目(No.62075235) （No.62075235）
国家重点研发计划项目(No.2021YFF0700700) （No.2021YFF0700700）
中国科学院青年创新促进会(No.2019320) （No.2019320）
中国科学院战略性先导科技专项(No.XDA16021304)Supported by the National Natural Science Foundation of China(No.62075235) （No.XDA16021304）
The National Key Research and Development Program of China(No.2021YFF0700700) （No.2021YFF0700700）
Youth Innovation Promotion Association(No.2019320) （No.2019320）
The Strategic Priority Research Program of the Chinese Academy of Sciences(No.XDA16021304) （No.XDA16021304）
