中国光学（中英文）2024，Vol.17Issue(3)：693-703,11.DOI:10.37188/CO.EN-2023-0016
CCD/EMCCD光电参数测试系统的设计与应用
Design and application of CCD/EMCCD photoelectronic parameter test system
摘要
Abstract
A photoelectrical parameters test system for testing CCD and electron-multiplying charge-coupled device(EMCCD)chips is designed.The test system has automatic and manual modes,and it can test the dark currents,the output amplifier's responsivity,charge transfer efficiency,charge capacity and other parameters.According to different specifications and structures of CCD/EMCCD devices,we complete the parameter test of wafer or packaged product.The developed system can be used for the testing and sorting for 576×288,640×512,768×576,1024×1024,1280×1024 CCD and EMCCD chips.关键词
CCD/EMCCD/测试系统/光电参数Key words
CCD/EMCCD/test system/photoelectrical parameters分类
信息技术与安全科学引用本文复制引用
沈吉,VIACHESLAV V.Zabudsky,常维静,那启跃,简云飞,OLEG V.Rikhalsky,OLEKSANDR G.Golenkov,VOLODYMYR P.Reva..CCD/EMCCD光电参数测试系统的设计与应用[J].中国光学（中英文）,2024,17(3):693-703,11.基金项目
科技创新2030-"新一代人工智能"重大项目(No.2018AAA0103100)Supported by National Science and Technology Major Project from Minster of Science and Technology,China(No.2018AAA0103100) （No.2018AAA0103100）
