中南民族大学学报（自然科学版）2024，Vol.43Issue(4)：561-566,6.DOI:10.20056/j.cnki.ZNMDZK.20240710
磁控溅射法制备钛镓锌氧化物透明导电膜的介电和光电性能研究
The dielectric and opto-electronic properties of titanium-gallium-zinc oxide transparent conducting films prepared by magnetron-sputtering method
摘要
Abstract
The transparent conducting films(TCFs)of titanium-gallium-zinc oxide(TiGaZnO)were fabricated by magnetron-sputtering technique.The dependence of dielectric,opto-electronic and structural properties of the TiGaZnO TCFs on substrate temperature was investigated.The results indicate that all the thin films have a wurtzite hexagonal crystal structure and(002)-preferred orientation.The substrate temperature has a significant impact on the film properties of the TiGaZnO TCFs.The sample fabricated at 610 K possesses the optimal opto-electronic performance and crystalline quality,with the highest quality factor,maximum average visible transmittance,lowest resistivity and largest average grain size of 1.23×104 Ω-1·cm-1,86.85%,5.76×10-4 Ω·cm and 83.42 nm,respectively.Moreover,the optical constants of the TiGaZnO TCFs were determined by the optical spectrum fitting method(OSFM).The influences of substrate temperature on the optical constants and dielectric properties were studied.The results demonstrate that the refractive index,dielectric constant and dissipation factor are dependent on the substrate temperature for the TiGaZnO TCFs.关键词
透明导电膜/氧化锌/介电常数/光电性能Key words
transparent conducting films/zinc oxide/dielectric constant/opto-electronic properties分类
信息技术与安全科学引用本文复制引用
陆轴,郭声彦,谢泉..磁控溅射法制备钛镓锌氧化物透明导电膜的介电和光电性能研究[J].中南民族大学学报（自然科学版）,2024,43(4):561-566,6.基金项目
贵州省科学技术基金资助项目(黔科合基础[2019]1248) （黔科合基础[2019]1248）
