燕山大学学报2024，Vol.48Issue(3)：265-273,9.DOI:10.3969/j.issn.1007-791X.2024.03.009
非晶氧化铝薄膜结构及其不同色散模型光谱椭偏对比研究
Spectroscopic ellipsometry comparison of structure and different dispersion models of amorphous aluminum oxide thin films
摘要
Abstract
It is difficult to predict the properties of amorphous aluminum oxide nano-film.In this work,a comparative analysis method of different dispersion models based on spectroscopic ellipsometry is proposed,which can be used to calculate the structure and the optoelectronic parameters in nano-film.The phase structure,micromorphology and photoelectric properties of films prepared by atomic layer deposition are systematically investigated using the Tauc-Lorentz and the Forouhi-Bloomer dispersion models.The results show that the film has an amorphous structure and a smooth surface without cracks.The structural parameters and photoelectric constants obtained by different models are not consistent with each other.The thickness of the film obtained using Forouhi-Bloomer model is closer to the results measured by scanning electron microscope,and the roughness of the film obtained by Tauc-Lorentz model is more consistent with the results of atomic force microscopy.The band gap result extracted by the Tauc-Lorentz model and the bandgap width derived from the Tauc method are both kept at about 3 eV.According to the analysis,the differences of structural parameters are mainly caused by the differences in mathematical processing methods and model parameter descriptions of different models.关键词
非晶氧化铝/原子层沉积/光谱椭偏/Tauc-Lorentz模型/Forouhi-Bloomer模型Key words
amorphous aluminum oxide/atomic layer deposition/spectroscopic ellipsometry/Tauc-Lorentz model/Forouhi-Bloomer model分类
通用工业技术引用本文复制引用
石树正,马宏,王占英,庞永俊..非晶氧化铝薄膜结构及其不同色散模型光谱椭偏对比研究[J].燕山大学学报,2024,48(3):265-273,9.基金项目
国家自然科学基金资助项目(51975541) （51975541）
河北省高校基本科研业务费项目(2022QNJS01) （2022QNJS01）
河北建筑工程学院博士科研启动基金项目(B-202301) （B-202301）
河北省高等教育教学改革研究与实践项目(2022GJJG327) （2022GJJG327）
张家口市基础研究和人才培养计划项目(2311006A,2311005A,2311022B) （2311006A,2311005A,2311022B）
