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Metasurface array for single-shot spectroscopic ellipsometry

Shun Wen Xinyuan Xue Shuai Wang Yibo Ni Liqun Sun Yuanmu Yang

光：科学与应用（英文版）2024，Vol.13Issue(5)：835-842,8.

光：科学与应用（英文版）2024，Vol.13Issue(5)：835-842,8.DOI:10.1038/s41377-024-01396-3

Metasurface array for single-shot spectroscopic ellipsometry

Shun Wen ¹Xinyuan Xue ¹Shuai Wang ¹Yibo Ni ¹Liqun Sun ¹Yuanmu Yang¹

作者信息

1. Department of Precision Instrument,State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China
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摘要

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Shun Wen,Xinyuan Xue,Shuai Wang,Yibo Ni,Liqun Sun,Yuanmu Yang..Metasurface array for single-shot spectroscopic ellipsometry[J].光：科学与应用（英文版）,2024,13(5):835-842,8.

基金项目

This work was supported by the National Natural Science Foundation of China(62135008,61975251)and by the Guoqiang Institute,Tsinghua University. （62135008,61975251）

光：科学与应用（英文版）

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ISSN：2095-5545

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