现代科学仪器2024，Vol.41Issue(3)：39-41,3.
ICP-AES法测定二氧化铪中铁元素和磷元素
Determination of iron and phosphorus in hafnium dioxide by ICP-AES
殷佳 1李亚琴 1郝文婷1
作者信息
- 1. 宁夏东方钽业股份有限公司,宁夏石嘴山市 753000
- 折叠
摘要
Abstract
Hafnium dioxide is an important inorganic compound,which plays a major role in refractory materials,ceramic materials,nuclear industry,catalysts and so on.As one of the most promising materials in the field of microelectronics,the impurity elements in hafnium dioxide have a very critical impact on its properties,quality reliability and application.In water bath,the sample is dissolved with nitric acid and hydrofluoric acid.A new method for the determination of impurity elements Fe and P in hafnium dioxide by ICP-AES was established.Fe 239.562nm and P 178.284nm were selected as analytical spectral lines,matrix matching was used to eliminate the influence of matrix effect.In the linear range,the correlation coefficient of each element calibration curve is good.The detection limit of the method was 0.0039μg/ml-0.0057μg/ml.The relative standard deviation of the results is less than 7.14% .The recoveries were 97.2%～115.0% .关键词
ICP-AES法/二氧化铪/杂质元素Key words
ICP-AES/hafnium dioxide/impurity element引用本文复制引用
殷佳,李亚琴,郝文婷..ICP-AES法测定二氧化铪中铁元素和磷元素[J].现代科学仪器,2024,41(3):39-41,3.
