真空热处理对不锈钢表面TiN薄膜结构及性能的影响OACSTPCD

In order to improve the corrosion resistance of stainless steel materials in the marine environ-ment,TiN thin films were deposited on the surface of 304 stainless steel by magnetron sputtering tech-nique and vacuum heat-treated at different temperatures,and the effects of the heat-treatment tempera-ture on the structure and properties of the films were investigated.The results show that proper vacuum heat treatment can improve the crystallinity and densification of TiN film on the surface of 304 stainless steel and relieve its residual stress.Compared with the untreated film,the internal stress of the film can be reduced by 87%after the vacuum heat treatment at 500℃,the adhesive strength with the substrate increases by 78%,its corrosion current density is reduced from 2.42×10-6 A/cm2 to 4.43×10-7 A/cm2,and the corrosion potential increases from-0.247 V to-0.044 V,which improves the corrosion resistance significantly.