西安工程大学学报2024，Vol.38Issue(3)：32-38,7.DOI:10.13338/j.issn.1674-649x.2024.03.005
真空热处理对不锈钢表面TiN薄膜结构及性能的影响
Effect of vacuum heat treatment on structure and properties of TiN thin film deposited stainless steel surface
摘要
Abstract
In order to improve the corrosion resistance of stainless steel materials in the marine environ-ment,TiN thin films were deposited on the surface of 304 stainless steel by magnetron sputtering tech-nique and vacuum heat-treated at different temperatures,and the effects of the heat-treatment tempera-ture on the structure and properties of the films were investigated.The results show that proper vacuum heat treatment can improve the crystallinity and densification of TiN film on the surface of 304 stainless steel and relieve its residual stress.Compared with the untreated film,the internal stress of the film can be reduced by 87%after the vacuum heat treatment at 500℃,the adhesive strength with the substrate increases by 78%,its corrosion current density is reduced from 2.42×10-6 A/cm2 to 4.43×10-7 A/cm2,and the corrosion potential increases from-0.247 V to-0.044 V,which improves the corrosion resistance significantly.关键词
真空热处理/TiN薄膜/不锈钢/残余应力/结合强度/耐腐蚀性Key words
vacuum heat treatment/TiN thin film/stainless steel/residual stress/adhesive strength/corrosion resistance分类
矿业与冶金引用本文复制引用
卢琳琳,刘晨曦,曹航玮,徐洁,刘禹松,范重庆..真空热处理对不锈钢表面TiN薄膜结构及性能的影响[J].西安工程大学学报,2024,38(3):32-38,7.基金项目
陕西省自然科学基础研究计划项目(2023-JC-YB-471,2023-JC-YB-476) （2023-JC-YB-471,2023-JC-YB-476）
