高品级氮化铝粉体及其碳热还原氮化工艺研究进展OA北大核心CSTPCD

Aluminum nitride(AlN)has high thermal conductivity,good insulation,low thermal expansion coefficient,non-magnetic,and other excellent properties used as a key material for high-end equipment in semiconductor,electric vacuum,and other fields.Especially in aerospace,rail transportation,new energy equipment,high-power LED,5G communication,power transmission,industrial control,and other fields of power devices,AlN has an irreplaceable role.The high-grade powders are the basis for the preparation of high-performance ceramics.The properties of AlN powders directly affect the forming,sintering,microstructure,and performance of the AlN ceramics.Carbothermal reduction-nitridation method is a promising method to produce the AlN powders with high purity,fine particle size,and high sintering property.The evaluation indexes of the AlN powders and the research progress on the carbothermal reduction-nitridation of AlN powders were reviewed in this paper,and the direction and trend of future research and industrialization were proposed.