东华大学学报（英文版）2024，Vol.41Issue(3)：241-248,8.DOI:10.19884/j.1672-5220.202303007
大尺寸单层石墨烯图案的金网转移
Aurum-Mesh Transfer of Large-Scale Monolayer Graphene Patterns
摘要
Abstract
When graphene prepared by chemical vapor deposition(CVD)method is applied to various high-performance devices,graphene's transfer and patterning process usually reduces its intrinsic properties.A new method combining wet transfer and mechanical exfoliation can be utilized to accomplish high-quality and large-scale transfer of graphene patterns.This method requires the preparation of an aurum(Au)-mesh with pores of a specific form as the peeling belt.The contact area between the Au and graphene can offer sufficient adhesion to the homogeneous monolayer graphene for mechanical exfoliation,whereas the non-contact area between the hole and graphene has a relatively weak force to release the graphene patterns on the substrate.The surface morphology and electrical characterization of graphene show that the graphene surface is clean and uniform,while graphene field-effect transistors have high carrier mobility and small Dirac voltage.The Au-mesh transfer method can effectively improve the quality of the graphene patterns as well as the efficiency of the transfer,which opens up a broader scope for the application of CVD graphene and also provides a reference for the transfer of other CVD two-dimensional(2D)materials.关键词
石墨烯转移/石墨烯图案/金网/光刻/晶体管Key words
graphene transfer/graphene pattern/Au-mesh/lithography/transistor分类
信息技术与安全科学引用本文复制引用
李超,姜萌..大尺寸单层石墨烯图案的金网转移[J].东华大学学报（英文版）,2024,41(3):241-248,8.
