金刚石与磨料磨具工程2024，Vol.44Issue(3)：279-285,7.DOI:10.13394/j.cnki.jgszz.2023.0101
热丝化学气相沉积法制备单晶金刚石的试验研究
Experimental study on synthesis of single crystal diamond by hot filament chemical vapor deposition method
摘要
Abstract
The deposition area of the hot filament chemical vapor deposition(HFCVD)method can reach 12 inches,which has the potential to produce larger-sized single crystal diamonds.In this study,single crystal diamond with a size of 3 mm×3 mm×1 mm and(100)orientation was used as the substrate.Homoepitaxial growth was carried out using the HFCVD method with methane and hydrogen as precursors,and a small amount of nitrogen gas.The results show that under the conditions of a filament temperature of 2 200 ℃,a carbon source concentration of 4%,and a chamber pressure of 4 kPa,single crystal diamond grows at a rate of 3.41 μm/h.The surface of the diamond exhibits no defects such as polycrystals,cracks,or holes.The full width half maximum(FWHM)of the epitaxial layer's X-ray diffraction spectrum at the(400)peak is 0.11°,which is lower than that of the substrate at 0.16°,indicating that the crystal quality of the epitaxial layer is higher than that of the substrate.The introduction of nitrogen can increase the growth rate of single crystal diamond,although it reduces the crystal quality of the epitaxial layer.A higher nitrogen concentration can also shift the growth mode of single crystal diamond change to island growth.关键词
热丝化学气相沉积法/单晶金刚石/工艺参数优化/氮气掺杂Key words
hot filament chemical vapor deposition/single crystal diamond/optimization of deposition parameters/ni-trogen doping分类
化学工程引用本文复制引用
张川,刘栋栋,陆明,孙方宏..热丝化学气相沉积法制备单晶金刚石的试验研究[J].金刚石与磨料磨具工程,2024,44(3):279-285,7.基金项目
国家自然科学基金项目"基于陶瓷中间过渡层的梯度渐变超纳米金刚石复合涂层制备新技术与应用基础研究"(项目编号:52175424). （项目编号:52175424）
