金刚石与磨料磨具工程2024，Vol.44Issue(3)：286-296,11.DOI:10.13394/j.cnki.jgszz.2023.0132
金刚石基材料及其表面微通道制备技术在高效散热中的应用
Application of diamond based materials and surface microchannel fabrication technology in efficient heat dissipation
摘要
Abstract
With the rise of third-generation semiconductors,electronic devices are evolving towards high-power,mini-aturization,and integration.Traditional heat dissipation technologies are no longer sufficient to meet the heat dissipa-tion requirements of high heat flux in third-generation semiconductor devices.Temperature accumulation has become a major cause of device failure.Diamond-based materials have excellent thermal properties.Efficient heat dissipation technology based on these materials has become a key direction to solve the high heat flux dissipation problem.This art-icle summarizes the development of diamond-based materials and the main methods for preparing surface microchan-nels.It reviews the application and development trends of diamond-based materials in the field of efficient heat dissipa-tion.The development and application of diamond-based materials for efficient heat dissipation technology can provide technical support for addressing the problem of high heat flux dissipation.关键词
金刚石/微通道/加工/高效散热Key words
diamond/microchannel/fabrication/efficient heat dissipation分类
矿业与冶金引用本文复制引用
邓世博,夏永琪,吴明涛,岳晓斌,雷大江..金刚石基材料及其表面微通道制备技术在高效散热中的应用[J].金刚石与磨料磨具工程,2024,44(3):286-296,11.基金项目
国家自然科学基金(52005461) （52005461）
河南省重大科技专项(221100230300). （221100230300）
