激光技术2024，Vol.48Issue(3)：340-344,5.DOI:10.7510/jgjs.issn.1001-3806.2024.03.007
氧化物光学薄膜的压入硬度研究
Indent hardness of optical oxide films
马孜 1李斌 1童静 1姚德武 1沈刚1
作者信息
- 1. 西南技术物理研究所,成都 610041,中国
- 折叠
摘要
Abstract
To evaluate the effect of ion source assistance on different oxide films,TiO2,Ta2O5,ZrO2 and SiO2 were deposited with different radio frequency(RF)sources.The index and thickness were measured by a spectroscopic ellipsometer.The Young's module and the hardness of these films were compared.Experiments show that the value of Young's module and hardness are increased,2 GPa for TiO2,4 GPa for Ta2O5,2 GPa for ZrO2,in accordance with the film index.The nano-indention method is effective in evaluating the ability of ion sources.关键词
薄膜/纳米压痕/压入硬度/氧化物Key words
thin films/nanoindentation/indentation hardness/oxide分类
数理科学引用本文复制引用
马孜,李斌,童静,姚德武,沈刚..氧化物光学薄膜的压入硬度研究[J].激光技术,2024,48(3):340-344,5.
