无机材料学报2024，Vol.39Issue(6)：634-646,13.DOI:10.15541/jim20230530
以非氧化物为烧结助剂制备高导热氮化硅陶瓷的研究进展
Research Progress of High Thermal Conductivity Silicon Nitride Ceramics Prepared by Non-oxide Sintering Additives
摘要
Abstract
The development trend of high voltage,high current and high-power density of power semiconductor devices has raised the requirement for the heat dissipation capability and reliability of ceramic substrates in devices.Silicon nitride(Si3N4)ceramics,known for their high thermal conductivity and excellent mechanical properties,have emerged as a preferred thermal dissipation substrate material for high-power electronic devices.However,there is a significant gap between experimental and theoretical values of thermal conductivity in Si3N4 ceramics.The long period of heat preservation during preparation leads to excessive grain growth,compromising mechanical properties and increasing costs,which hinders large-scale application.Lattice oxygen defects act as main factor limiting thermal conductivity of Si3N4 ceramics.Now,researchers are exploring ways to promote removal of lattice oxygen and full development of bimodal morphology formation of Si3N4,by selecting non-oxide sintering additives to reduce the oxygen content in the system,adjusting the composition and properties of the liquid phase,constructing a"nitrogen-rich-oxygen-deficient"liquid phase,and regulating the dissolution and precipitation process in the liquid phase.These efforts aim to the synergistic optimization of thermal conductivity-mechanical properties of Si3N4 ceramics.Based on the elemental classification,we review the non-oxide sintering additives developed at domestic and abroad,explain how they improve the thermal conductivity of Si3N4 ceramics from liquid-phase modulation and microscopic morphology control,analyze the grain development and morphology evolution laws,and discusse the mechanism of lattice oxygen removal.The out look on future development of high thermal conductivity Si3N4 ceramics is also prospected.关键词
氮化硅/热导率/力学性能/液相烧结/非氧化物烧结助剂/综述Key words
Si3N4/thermal conductivity/mechanical property/liquid phase sintering/non-oxide sintering additive/review分类
化学化工引用本文复制引用
王伟明,王为得,粟毅,马青松,姚冬旭,曾宇平..以非氧化物为烧结助剂制备高导热氮化硅陶瓷的研究进展[J].无机材料学报,2024,39(6):634-646,13.基金项目
国家自然科学基金(52202077) （52202077）
国防科技重点实验室基金(6142907220303) （6142907220303）
国防科技基础加强计划资助(2022-JCJQ-LB-073)National Natural Science Foundation of China(52202277) （2022-JCJQ-LB-073）
National Defense Science and Technology Key Laboratory Fund(6142907220303) （6142907220303）
National Defense Science and Technology Basic Enhancement Program Grant(2022-JCJQ-LB-073) （2022-JCJQ-LB-073）
