无机材料学报2024，Vol.39Issue(6)：715-725,11.DOI:10.15541/jim20230564
氮空位调控晶格畸变度强化(NbMoTaW)Nx薄膜的力学性质和耐磨损性
Nitrogen Vacancy Regulated Lattice Distortion on Improvement of(NbMoTaW)Nx Thin Films:Mechanical Properties and Wear Resistance
摘要
Abstract
High-entropy transition metal nitrides(HENs)are renowned for their thermal stability,corrosion and oxidation resistance,and exceptional mechanical properties,endowing them suitable for use as surface protection films for structural and moving components.However,mapping relationship between broadly adjustable metal components and mechanical properties of HENs is quite complex due to their diversity of HENs components.Taking(NbMoTaW)Nx thin film as the research object,this study prepared(NbMoTaW)Nx(x=0,0.59,0.80,0.95)thin films with different nitrogen contents by regulating nitrogen flow velocity during the film growth process based on the magnetron sputtering technique.Following analysis of(NbMoTaW)Nx thin films'composition,structure,morphology,and performance,the primary influence mechanism that govern their mechanical properties were explored.The findings revealed that by manipulating nitrogen vacancy,coordinated regulation over the lattice distortions of the nitrogen and metal sublattices was achieved.Due to high degree of the nitrogen and metal sublattice distortions,the(NbMoTaW)N0.80 sample demonstrated the highest hardness and best wear resistance performance.After excluding factors such as electronic structure,residual stress,and grain size that affect mechanical properties,a direct relationship between lattice distortions and mechanical properties of HENs films was confirmed.In summary,this research has unearthed a straightforward strategy for controlling the lattice distortions,offering a novel approach to adjust and optimize the performance of nitride films,and ultimately providing a more effective solution to address the mechanical damage issues that arise in the context of complex service environments.关键词
晶格畸变度/氮空位/力学性质/高熵过渡金属氮化物/耐磨损性Key words
lattice distortion/nitrogen vacancy/mechanical property/high-entropy transition metal nitride/wear resistance分类
化学化工引用本文复制引用
张睿,张侃,袁梦雅,谷鑫磊,郑伟涛..氮空位调控晶格畸变度强化(NbMoTaW)Nx薄膜的力学性质和耐磨损性[J].无机材料学报,2024,39(6):715-725,11.基金项目
国家自然科学基金(52322206,51972139) （52322206,51972139）
国家重点研发计划(2023YFF0716800) （2023YFF0716800）
吉林省自然科学基金(20210101062JC)National Natural Science Foundation of China(52322206,51972139) （20210101062JC）
National Key R&D Program of China(2023YFF0716800) （2023YFF0716800）
Science and Technology Development Program of Jilin Province(20210101062JC) （20210101062JC）
